Electron-beam spectroscopy for nanophotonics
نویسندگان
چکیده
منابع مشابه
Electron-beam exposure mechanisms in hydrogen silsesquioxane investigated by vibrational spectroscopy and in situ electron-beam-induced desorption
Hydrogen silsesquioxane HSQ is used as a high-resolution resist with resolution down below 10 nm half-pitch. This material or materials with related functionalities could have widespread impact in nanolithography and nanoscience applications if the exposure mechanism was understood and instabilities controlled. Here we have directly investigated the exposure mechanism using vibrational spectros...
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1Nonlinear Physics Centre and CUDOS@ANU, Research School of Physics and Engineering, Australian National University, Canberra, Australian Capital Territory 2601, Australia 2School of Physics and Astronomy, University of Exeter, Exeter EX4 4QL, UK 3Department of Physics, Imperial College London, London SW7 2AZ, UK 4Optoelectronics Research Centre, University of Southampton, Southampton SO17 1BJ, UK
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ژورنال
عنوان ژورنال: Nature Materials
سال: 2019
ISSN: 1476-1122,1476-4660
DOI: 10.1038/s41563-019-0409-1